Models Description of Calibration Sites
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Omni: 0.5 to 1,050 micron Lines, Spaces, Pitch and Circles.
SM: 0.5 to 10 micron Lines, Spaces and Pitch.
LWS1: 1 to 10 micron Lines, Spaces and Pitch.
LWS10: 10 to 100 micron Lines, Spaces and Pitch.
LWS20: 10 to 20 micron Lines, Spaces and Pitch.
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