Line Width Standards


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Models Description of Calibration Sites

Omni: 0.5 to 1,050 micron Lines, Spaces, Pitch and Circles.

SM: 0.5 to 10 micron Lines, Spaces and Pitch.

LWS1: 1 to 10 micron Lines, Spaces and Pitch.

LWS10: 10 to 100 micron Lines, Spaces and Pitch.

LWS20: 10 to 20 micron Lines, Spaces and Pitch.

All the above are supplied for use in Transmitted or Reflected light and are

available on larger substrates by special order.

Roger K. Sherman Co.

325 Los Altos Ave., Los Altos, CA 94022